Inventor
WENZEL KEVIN W
US10 patents
⚠️ This page may combine multiple inventors who share the name “WENZEL KEVIN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
5 patentsUS10940635B2Mar 9, 2021
Method and apparatus for processing dielectric materials using microwave energy
MKS INSTR INC2 citations72
US10071521B2Sep 11, 2018
Method and apparatus for processing dielectric materials using microwave energy
MKS INSTR INC2 citations72
US9653266B2May 16, 2017
Microwave plasma applicator with improved power uniformity
MKS INSTR INC3 citations67
US9991098B2Jun 5, 2018
Toroidal plasma abatement apparatus and method
MKS INSTR INC0 citations51
US9630142B2Apr 25, 2017
Toroidal plasma abatement apparatus and method
MKS INSTR INC0 citations51
AXCELIS TECH INC
3 patentsUS6903350B1Jun 7, 2005
Ion beam scanning systems and methods for improved ion implantation uniformity
AXCELIS TECH INC46 citations92
US6891174B2May 10, 2005
Method and system for ion beam containment using photoelectrons in an ion beam guide
AXCELIS TECH INC14 citations83
US7064340B1Jun 20, 2006
Method and apparatus for ion beam profiling
AXCELIS TECH INC13 citations79