Inventor
NISHIYA AKIRA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “NISHIYA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS6382849B1May 7, 2002
Developing method and developing apparatus
TOKYO ELECTRON LTD35 citations92
US6267516B1Jul 31, 2001
Developing apparatus and developing nozzle
TOKYO ELECTRON LTD35 citations92
US7919727B2Apr 5, 2011
Laser processing apparatus and laser processing method
TOKYO ELECTRON LTD10 citations83
US7710582B2May 4, 2010
Laser processing apparatus and laser processing method for cutting and removing a part of a surface region of a substrate
TOKYO ELECTRON LTD11 citations83
US7473321B2Jan 6, 2009
Laser treatment apparatus
TOKYO ELECTRON LTD9 citations83
US7622000B2Nov 24, 2009
Laser processing apparatus and laser processing method
TOKYO ELECTRON LTD7 citations73
US6706321B2Mar 16, 2004
Developing treatment method and developing treatment unit
TOKYO ELECTRON LTD12 citations73
US7518087B2Apr 14, 2009
Laser processing apparatus and laser processing method
TOKYO ELECTRON LTD5 citations62