Inventor

HA HYOUNG-CHAN

US8 patents

⚠️ This page may combine multiple inventors who share the name “HA HYOUNG-CHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GANGULI SESHADRI

3 patents

US8637390B2Jan 28, 2014

Metal gate structures and methods for forming thereof

GANGULI SESHADRI12 citations83

US8563424B2Oct 22, 2013

Process for forming cobalt and cobalt silicide materials in tungsten contact applications

GANGULI SESHADRI10 citations83

US8187970B2May 29, 2012

Process for forming cobalt and cobalt silicide materials in tungsten contact applications

GANGULI SESHADRI12 citations83

APPLIED MATERIALS INC

2 patents

US7867578B2Jan 11, 2011

Method for depositing an amorphous carbon film with improved density and step coverage

APPLIED MATERIALS INC12 citations84

US9209074B2Dec 8, 2015

Cobalt deposition on barrier surfaces

APPLIED MATERIALS INC5 citations83

LEE SANG-HYEOB

1 patent

US9129945B2Sep 8, 2015

Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance

LEE SANG-HYEOB10 citations82

LU JIANG

1 patent

US9051641B2Jun 9, 2015

Cobalt deposition on barrier surfaces

LU JIANG8 citations82

KIM HOON

1 patent

US9926639B2Mar 27, 2018

Methods for forming barrier/seed layers for copper interconnect structures

KIM HOON0 citations41