Inventor
SHIH JAW-LIH
TW5 patents
Patents
5 patentsUS9128387B2Sep 8, 2015
Ultraviolet light emitting diode array light source for photolithography and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations67
US11092898B2Aug 17, 2021
Systems and methods for a narrow band high transmittance interference filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US9835952B2Dec 5, 2017
Systems and methods for a narrow band high transmittance interference filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9452509B2Sep 27, 2016
Sapphire pad conditioner
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10871720B2Dec 22, 2020
Apparatus for supporting a semiconductor wafer and method of vibrating a semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations35