Inventor
CHOU HONG-HSING
TW15 patents
⚠️ This page may combine multiple inventors who share the name “CHOU HONG-HSING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
13 patentsUS9550270B2Jan 24, 2017
Temperature modification for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations78
US10163609B2Dec 25, 2018
Plasma generation for ion implanter
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US9128387B2Sep 8, 2015
Ultraviolet light emitting diode array light source for photolithography and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations67
US9720325B2Aug 1, 2017
Photoresist coating scheme
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations65
US11768439B2Sep 26, 2023
Systems and methods for a narrow band high transmittance interference filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11092898B2Aug 17, 2021
Systems and methods for a narrow band high transmittance interference filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US9097972B2Aug 4, 2015
Method of applying photoresist to a semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9835952B2Dec 5, 2017
Systems and methods for a narrow band high transmittance interference filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9791415B2Oct 17, 2017
Method for monitoring usage of a physical vapor deposition (PVD) target with an ultrasonic transducer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9452509B2Sep 27, 2016
Sapphire pad conditioner
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9575012B2Feb 21, 2017
Automated wafer inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45
US9970105B2May 15, 2018
Method for sealing processing module
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations36
US10871720B2Dec 22, 2020
Apparatus for supporting a semiconductor wafer and method of vibrating a semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations35