Inventor
WANG YEH-CHIEH
TW18 patents
⚠️ This page may combine multiple inventors who share the name “WANG YEH-CHIEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
12 patentsUS9550270B2Jan 24, 2017
Temperature modification for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations78
US10020182B2Jul 10, 2018
Digital wireless data collection
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US9786539B2Oct 10, 2017
Wafer chuck
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US9128387B2Sep 8, 2015
Ultraviolet light emitting diode array light source for photolithography and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations67
US11768439B2Sep 26, 2023
Systems and methods for a narrow band high transmittance interference filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11092898B2Aug 17, 2021
Systems and methods for a narrow band high transmittance interference filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11875973B2Jan 16, 2024
Methods for preparing void-free coatings for plasma treatment components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US12518979B2Jan 6, 2026
Exhaust manifold for semiconductor process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9835952B2Dec 5, 2017
Systems and methods for a narrow band high transmittance interference filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9452509B2Sep 27, 2016
Sapphire pad conditioner
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9620326B2Apr 11, 2017
Arc chamber with multiple cathodes for an ion source
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations43
US9970105B2May 15, 2018
Method for sealing processing module
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations36