Inventor
CHANG HSIN-KUO
TW3 patents
Patents
3 patentsUS9128387B2Sep 8, 2015
Ultraviolet light emitting diode array light source for photolithography and method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations67
US10871720B2Dec 22, 2020
Apparatus for supporting a semiconductor wafer and method of vibrating a semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations35
US10115581B2Oct 30, 2018
Removal of particles on back side of wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations30