Inventor · disambiguated record
Isao Mita
Also filed as: MITA ISAO
3 granted patents·1 pending application·1 citations·filing 2011–2014
50Inventor score
Top patents by PatentIndex Score
4 records- 0156US8765353B2Resist composition and method for producing semiconductor deviceARIMITSU KOJI·Filed 2011·Granted Jul 1, 2014·1 cites·5 claims
- 0253US9304399B2Resist composition and method for producing semiconductor deviceSONY CORP·Filed 2014·Granted Apr 5, 2016·0 cites·5 claims
- 0340US2014273513A1Resist composition and manufacturing method of semiconductor deviceSONY CORP·Filed 2014·Application pending·0 cites
- 0432US8697342B2Method of modifying chemically amplified resist pattern, modifier for chemically amplified resist pattern, and resist pattern structureTAKEMURA ICHIRO·Filed 2011·Granted Apr 15, 2014·0 cites·15 claims
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