Inventor
YAMABE SHUHEI
JP6 patents
Patents
6 patentsUS11532461B2Dec 20, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations69
US11984300B2May 14, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US11978614B2May 7, 2024
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations48
US11869750B2Jan 9, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations47
US11715630B2Aug 1, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations45
US10847348B2Nov 24, 2020
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations37