Inventor
ZENG XIANZHONG
US15 patents
⚠️ This page may combine multiple inventors who share the name “ZENG XIANZHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WESTERN DIGITAL FREMONT LLC
6 patentsUS7910267B1Mar 22, 2011
Method and system for providing optical proximity correction for structures such as a PMR nose
WESTERN DIGITAL FREMONT LLC154 citations99
US7846643B1Dec 7, 2010
Method and system for providing a structure in a microelectronic device using a chromeless alternating phase shift mask
WESTERN DIGITAL FREMONT LLC148 citations99
US7785666B1Aug 31, 2010
Methods for fabricating a magnetic recording device
WESTERN DIGITAL FREMONT LLC153 citations99
US9007719B1Apr 14, 2015
Systems and methods for using double mask techniques to achieve very small features
WESTERN DIGITAL FREMONT LLC2 citations63
US9001467B1Apr 7, 2015
Method for fabricating side shields in a magnetic writer
WESTERN DIGITAL FREMONT LLC2 citations61
US9104107B1Aug 11, 2015
DUV photoresist process
WESTERN DIGITAL FREMONT LLC0 citations52