Inventor
OZASA SUSUMU
JP15 patents
⚠️ This page may combine multiple inventors who share the name “OZASA SUSUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
10 patentsUS5523567AJun 4, 1996
Scanning electron microscope and image forming method therewith
HITACHI LTD27 citations92
US4801847AJan 31, 1989
Charged particle accelerator using quadrupole electrodes
HITACHI LTD26 citations92
US4658143AApr 14, 1987
Ion source
HITACHI LTD29 citations92
US4199688AApr 22, 1980
Apparatus for electron beam lithography
HITACHI LTD30 citations92
US4692579ASep 8, 1987
Electron beam lithography apparatus
HITACHI LTD21 citations81
US4396901AAug 2, 1983
Method for correcting deflection distortion in an apparatus for charged particle lithography
HITACHI LTD11 citations74
US4577111AMar 18, 1986
Apparatus for electron beam lithography
HITACHI LTD12 citations73
US4489241ADec 18, 1984
Exposure method with electron beam exposure apparatus
HITACHI LTD12 citations72
US4642461AFeb 10, 1987
Field emission type electron microscope using a multi-stage acceleration tube
HITACHI LTD10 citations71
US4629930ADec 16, 1986
Plasma ion source
HITACHI LTD4 citations60
NIPPON TELEGRAPH & TELEPHONE
4 patentsUS4589773AMay 20, 1986
Position detecting system
NIPPON TELEGRAPH & TELEPHONE87 citations95
US4443703AApr 17, 1984
Method and apparatus of deflection calibration for a charged particle beam exposure apparatus
NIPPON TELEGRAPH & TELEPHONE23 citations81
US4400622AAug 23, 1983
Electron lens equipment
NIPPON TELEGRAPH & TELEPHONE7 citations72
US4437008AMar 13, 1984
Electron beam control system
NIPPON TELEGRAPH & TELEPHONE5 citations62