Inventor · disambiguated record
Erik H. Anderson
Also filed as: ANDERSON ERIK H
4 granted patents·1 pending application·277 citations·filing 1987–2010
81Inventor score
Top patents by PatentIndex Score
5 records- 0196US4890309ALithography mask with a π-phase shifting attenuatorMASSACHUSETTS INST TECHNOLOGY·Filed 1987·Granted Dec 26, 1989·133 cites·18 claims
- 0292US5142385AHolographic lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 1991·Granted Aug 25, 1992·101 cites·12 claims
- 0381US5136169AEnergy beam locatingMASSACHUSETTS INST TECHNOLOGY·Filed 1991·Granted Aug 4, 1992·41 cites·50 claims
- 0472US7931850B2Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray lightUNIV COLORADO STATE RES FOUND·Filed 2010·Granted Apr 26, 2011·2 cites·10 claims
- 0554US2008093775A1Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray lightUNIV COLORADO STATE RES FOUND·Filed 2007·Application pending·0 cites
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