Inventor
IWATSU HARUO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “IWATSU HARUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS5312487AMay 17, 1994
Coating apparatus
TOKYO ELECTRON LTD85 citations95
US5127362AJul 7, 1992
Liquid coating device
TOKYO ELECTRON LTD145 citations95
US6268900B1Jul 31, 2001
Accommodating apparatus and substrate processing system
TOKYO ELECTRON LTD8 citations71
US10294575B2May 21, 2019
Electric field treatment method and electric field treatment device
TOKYO ELECTRON LTD2 citations70
US9087771B2Jul 21, 2015
Method for manufacturing semiconductor device, semiconductor device and jig for forming wiring
TOKYO ELECTRON LTD2 citations61
US10036095B2Jul 31, 2018
Electrolytic treatment method and electrolytic treatment apparatus
TOKYO ELECTRON LTD0 citations51
US10428438B2Oct 1, 2019
Substrate processing method and template
TOKYO ELECTRON LTD0 citations40