Inventor
DUNN L BRIAN
US9 patents
Patents
9 patentsUS6539963B1Apr 1, 2003
Pressurized liquid diffuser
MICRON TECHNOLOGY INC23 citations91
US5000208AMar 19, 1991
Wafer rinser/dryer
MICRON TECHNOLOGY INC45 citations88
US5884644AMar 23, 1999
Quartz tank for wet semiconductor wafer processing
MICRON TECHNOLOGY INC15 citations80
US6860279B2Mar 1, 2005
Pressurized liquid diffuser
MICRON TECHNOLOGY INC8 citations72
US6672319B2Jan 6, 2004
Pressurized liquid diffuser
MICRON TECHNOLOGY INC4 citations72
US5110001AMay 5, 1992
Handle for wafer carrier
MICRON TECHNOLOGY INC9 citations72
US6647996B2Nov 18, 2003
Method of diffusing pressurized liquid
MICRON TECHNOLOGY INC3 citations61
US6050739AApr 18, 2000
Robot end effector for automated wet wafer processing
MICRON TECHNOLOGY INC6 citations61
US6022052AFeb 8, 2000
Quartz tank for wet semiconductor wafer processing
MICRON TECHNOLOGY INC4 citations61