Inventor

UMEMOTO MAMORU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “UMEMOTO MAMORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US9593422B2Mar 14, 2017

Substrate processing apparatus and semiconductor device manufacturing method

HITACHI INT ELECTRIC INC2 citations71

US9963785B2May 8, 2018

Substrate processing apparatus and semiconductor device manufacturing method

HITACHI INT ELECTRIC INC0 citations50

KOKUSAI ELECTRIC CORP

1 patent

US11515152B2Nov 29, 2022

Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrate

KOKUSAI ELECTRIC CORP0 citations49

ASAI MASAYUKI

1 patent

US9175395B2Nov 3, 2015

Substrate processing apparatus and semiconductor device manufacturing method

ASAI MASAYUKI1 citations48