Inventor
CHEN EN-CHAN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHEN EN-CHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS11206493B2Dec 21, 2021
Sensor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12421103B2Sep 23, 2025
Microelectromechanical system device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11577954B2Feb 14, 2023
Method for forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10865099B2Dec 15, 2020
MEMS device and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
UNITED MICROELECTRONICS CORP
3 patentsUS9961450B2May 1, 2018
Piezoresistive microphone and method of fabricating the same
UNITED MICROELECTRONICS CORP3 citations70
US10793426B2Oct 6, 2020
Microelectromechanical system structure and method for fabricating the same
UNITED MICROELECTRONICS CORP0 citations49
US10087072B2Oct 2, 2018
Microelectromechanical system structure including thermal stability layer whose material has higher growth temperature, and method for fabricating the same
UNITED MICROELECTRONICS CORP0 citations49