Inventor · disambiguated record
Panu Pekko
Also filed as: PEKKO PANU
5 granted patents·1 pending application·18 citations·filing 2015–2017
73Inventor score
Files withTEKNOLOGIAN TUTKIMUSKESKUS VTT OY6
Top patents by PatentIndex Score
6 records- 0190US9837981B2Temperature compensated plate resonatorTEKNOLOGIAN TUTKIMUSKESKUS VTT OY·Filed 2015·Granted Dec 5, 2017·9 cites·16 claims
- 0288US9991869B2Temperature compensated compound resonatorTEKNOLOGIAN TUTKIMUSKESKUS VTT OY·Filed 2015·Granted Jun 5, 2018·7 cites·18 claims
- 0363US10931255B2Micromechanical resonatorTEKNOLOGIAN TUTKIMUSKESKUS VTT OY·Filed 2017·Granted Feb 23, 2021·1 cites·6 claims
- 0460US10056877B2Temperature compensated beam resonatorTEKNOLOGIAN TUTKIMUSKESKUS VTT OY·Filed 2015·Granted Aug 21, 2018·1 cites·22 claims
- 0547US10965267B2Micromechanical resonator and method for trimming micromechanical resonatorTEKNOLOGIAN TUTKIMUSKESKUS VTT OY·Filed 2017·Granted Mar 30, 2021·0 cites·13 claims
- 0638US2019112181A1Stabile micromechanical devicesTEKNOLOGIAN TUTKIMUSKESKUS VTT OY·Filed 2017·Application pending·0 cites
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