Inventor
FUSHIMI NAOSHIGE
JP3 patents
Patents
3 patentsUS11625518B2Apr 11, 2023
Learning device, inference device, and learned model
TOKYO ELECTRON LTD0 citations55
US11527404B2Dec 13, 2022
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations47
US12498276B2Dec 16, 2025
Process estimation system, process data estimation method, and recording medium
TOKYO ELECTRON LTD0 citations45