Inventor
HAIGH THOMAS J
US6 patents
⚠️ This page may combine multiple inventors who share the name “HAIGH THOMAS J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS10418277B2Sep 17, 2019
Air gap spacer formation for nano-scale semiconductor devices
IBM159 citations99
US9892961B1Feb 13, 2018
Air gap spacer formation for nano-scale semiconductor devices
IBM49 citations98
US10115629B2Oct 30, 2018
Air gap spacer formation for nano-scale semiconductor devices
IBM8 citations84
US9312224B1Apr 12, 2016
Interconnect structure containing a porous low k interconnect dielectric/dielectric cap
IBM9 citations84