P

Inventor

SHIMOMURA SHINICHIRO

JP9 patents
⚠️ This page may combine multiple inventors who share the name “SHIMOMURA SHINICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

6 patents
US6241827B1Jun 5, 2001

Method for cleaning a workpiece

TOKYO ELECTRON LTD41 citations92
US6357458B2Mar 19, 2002

Cleaning apparatus and cleaning method

TOKYO ELECTRON LTD15 citations83
US9278768B2Mar 8, 2016

Process liquid changing method and substrate processing apparatus

TOKYO ELECTRON LTD4 citations71
US11183396B2Nov 23, 2021

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations60
US12456632B2Oct 28, 2025

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD1 citations59
US9922849B2Mar 20, 2018

Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof

TOKYO ELECTRON LTD0 citations37

SONY CORP

1 patent
US9362106B2Jun 7, 2016

Substrate processing method, substrate processing apparatus, and storage medium

SONY CORP4 citations70

HYAKUTAKE HIRONOBU

1 patent
US9027573B2May 12, 2015

Substrate processing apparatus for maintaining a more uniform temperature during substrate processing

HYAKUTAKE HIRONOBU5 citations69

SUMITOMO CHEMICAL CO

1 patent
US11718740B2Aug 8, 2023

Method for producing thermoplastic elastomer composition

SUMITOMO CHEMICAL CO0 citations60