Inventor
MIHARA KATSUHIKO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MIHARA KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS5378145AJan 3, 1995
Treatment system and treatment apparatus
TOKYO ELECTRON LTD47 citations95
US5853486ADec 29, 1998
Treatment system and treatment apparatus with multi-stage carrier storage chambers
TOKYO ELECTRON LTD33 citations92
US5829969ANov 3, 1998
Vertical heat treating apparatus
TOKYO ELECTRON LTD34 citations92
US5788448AAug 4, 1998
Processing apparatus
TOKYO ELECTRON LTD77 citations92
US7547209B2Jun 16, 2009
Vertical heat treatment system and automatic teaching method for transfer mechanism
TOKYO ELECTRON LTD10 citations82
US5639234AJun 17, 1997
Treatment system and treatment apparatus
TOKYO ELECTRON LTD8 citations73
US7677858B2Mar 16, 2010
Vertical heat treatment system and method of transferring process objects
TOKYO ELECTRON LTD3 citations61
US7416405B2Aug 26, 2008
Vertical type of thermal processing apparatus and method of using the same
TOKYO ELECTRON LTD5 citations60