Inventor
DAVIS MATTHEW F
US17 patents
⚠️ This page may combine multiple inventors who share the name “DAVIS MATTHEW F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS7169625B2Jan 30, 2007
Method for automatic determination of semiconductor plasma chamber matching and source of fault by comprehensive plasma monitoring
APPLIED MATERIALS INC90 citations98
US7306696B2Dec 11, 2007
Interferometric endpoint determination in a substrate etching process
APPLIED MATERIALS INC33 citations96
US7652774B2Jan 26, 2010
Interferometric endpoint determination in a substrate etching process
APPLIED MATERIALS INC18 citations92
US6410889B2Jun 25, 2002
Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system
APPLIED MATERIALS INC24 citations92
US6323463B1Nov 27, 2001
Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system
APPLIED MATERIALS INC38 citations92
US7158221B2Jan 2, 2007
Method and apparatus for performing limited area spectral analysis
APPLIED MATERIALS INC14 citations90
US7330244B2Feb 12, 2008
Method and apparatus for performing limited area spectral analysis
APPLIED MATERIALS INC9 citations82
US6685799B2Feb 3, 2004
Variable efficiency faraday shield
APPLIED MATERIALS INC16 citations77
US7808651B2Oct 5, 2010
Determining endpoint in a substrate process
APPLIED MATERIALS INC6 citations74
US7815812B2Oct 19, 2010
Method for controlling a process for fabricating integrated devices
APPLIED MATERIALS INC2 citations62
US7602484B2Oct 13, 2009
Method and apparatus for performing limited area spectral analysis
APPLIED MATERIALS INC2 citations60
US7393459B2Jul 1, 2008
Method for automatic determination of substrates states in plasma processing chambers
APPLIED MATERIALS INC2 citations59
DAVIS MATTHEW F
3 patentsUS8232212B2Jul 31, 2012
Within-sequence metrology based process tuning for adaptive self-aligned double patterning
DAVIS MATTHEW F8 citations82
US8274645B2Sep 25, 2012
Method and apparatus for in-situ metrology of a workpiece disposed in a vacuum processing chamber
DAVIS MATTHEW F2 citations61
US8089046B2Jan 3, 2012
Method and apparatus for calibrating mass flow controllers
DAVIS MATTHEW F3 citations57