Inventor

AZUMA TOMOYUKI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “AZUMA TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SONY CORP

2 patents

US7767585B2Aug 3, 2010

Method of cleaning and process for producing semiconductor device

SONY CORP2 citations60

US7670496B2Mar 2, 2010

Process for producing structural body and etchant for silicon oxide film

SONY CORP2 citations58

AZUMA TOMOYUKI

1 patent

US8765002B2Jul 1, 2014

Substrate processing apparatus and substrate processing method

AZUMA TOMOYUKI0 citations32