Inventor

VETTER JAMES C

US6 patents

⚠️ This page may combine multiple inventors who share the name “VETTER JAMES C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents

US9659757B2May 23, 2017

Measuring and controlling wafer potential in pulsed RF bias processing

LAM RES CORP4 citations70

US6946303B2Sep 20, 2005

Electronically diagnosing a component in a process line using a substrate signature

LAM RES CORP3 citations60

US6890774B2May 10, 2005

System and method for creating a substrate signature

LAM RES CORP2 citations60

US10854492B2Dec 1, 2020

Edge ring assembly for improving feature profile tilting at extreme edge of wafer

LAM RES CORP0 citations38

KUTHI ANDRAS

2 patents

US8192576B2Jun 5, 2012

Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing

KUTHI ANDRAS2 citations56

US8303763B2Nov 6, 2012

Measuring and controlling wafer potential in pulsed RF bias processing

KUTHI ANDRAS0 citations45