Inventor

EILENSTINE GREG

US3 patents

⚠️ This page may combine multiple inventors who share the name “EILENSTINE GREG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KUTHI ANDRAS

2 patents

US8192576B2Jun 5, 2012

Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing

KUTHI ANDRAS2 citations56

US8303763B2Nov 6, 2012

Measuring and controlling wafer potential in pulsed RF bias processing

KUTHI ANDRAS0 citations45

LAM RES CORP

1 patent

US9659757B2May 23, 2017

Measuring and controlling wafer potential in pulsed RF bias processing

LAM RES CORP4 citations70