Inventor
CHOU YU-HUA
CA4 patents
⚠️ This page may combine multiple inventors who share the name “CHOU YU-HUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS7067409B2Jun 27, 2006
Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistance
TAIWAN SEMICONDUCTOR MFG10 citations69
US7378744B2May 27, 2008
Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistance
TAIWAN SEMICONDUCTOR MFG0 citations48
US7358612B2Apr 15, 2008
Plasma treatment at film layer to reduce sheet resistance and to improve via contact resistance
TAIWAN SEMICONDUCTOR MFG0 citations48