Inventor
UMMETHALA UPENDRA
US26 patents
⚠️ This page may combine multiple inventors who share the name “UMMETHALA UPENDRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
20 patentsUS11499869B2Nov 15, 2022
Optical wall and process sensor with plasma facing sensor
APPLIED MATERIALS INC10 citations85
US11114286B2Sep 7, 2021
In-situ optical chamber surface and process sensor
APPLIED MATERIALS INC14 citations85
US11784028B2Oct 10, 2023
Performing radio frequency matching control using a model-based digital twin
APPLIED MATERIALS INC4 citations75
US11808746B2Nov 7, 2023
Concentration sensor for precursor delivery system
APPLIED MATERIALS INC2 citations69
US11284018B1Mar 22, 2022
Smart camera substrate
APPLIED MATERIALS INC2 citations69
US11009538B2May 18, 2021
Micro resonator array system
APPLIED MATERIALS INC1 citations67
US12211670B2Jan 28, 2025
Performing radio frequency matching control using a model-based digital twin
APPLIED MATERIALS INC0 citations62
US11735401B2Aug 22, 2023
In-situ optical chamber surface and process sensor
APPLIED MATERIALS INC0 citations62
US11346875B2May 31, 2022
Micro resonator array sensor for detecting wafer processing parameters
APPLIED MATERIALS INC0 citations62
US11209398B2Dec 28, 2021
High quality factor embedded resonator wafers
APPLIED MATERIALS INC0 citations62
US10901021B2Jan 26, 2021
Method for detecting wafer processing parameters with micro resonator array sensors
APPLIED MATERIALS INC0 citations62
US12432461B2Sep 30, 2025
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US12114083B2Oct 8, 2024
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US12066639B2Aug 20, 2024
Adjustable achromatic collimator assembly for endpoint detection systems
APPLIED MATERIALS INC0 citations59
US11736818B2Aug 22, 2023
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US11719952B2Aug 8, 2023
Adjustable achromatic collimator assembly for endpoint detection systems
APPLIED MATERIALS INC1 citations59
US12560916B2Feb 24, 2026
Adjusting chamber performance by equipment constant updates
APPLIED MATERIALS INC0 citations49
US12504726B2Dec 23, 2025
Determining equipment constant updates by machine learning
APPLIED MATERIALS INC0 citations49
US12498705B2Dec 16, 2025
Chamber matching by equipment constant updates
APPLIED MATERIALS INC0 citations49
US12510878B2Dec 30, 2025
Physically-informed multi-system hardware operating windows
APPLIED MATERIALS INC0 citations47