Inventor · disambiguated record
Byung Gyu Song
Also filed as: SONG BYUNG GYU
2 granted patents·1 pending application·0 citations·filing 2009–2011
21Inventor score
Top patents by PatentIndex Score
3 records- 0140US9564294B2Plasma treatment apparatus and plasma antennaWOO SANG HO·Filed 2009·Granted Feb 7, 2017·0 cites·2 claims
- 0230US9416451B2Substrate processing device equipped with semicircle shaped antennaJE SUNG TAE·Filed 2011·Granted Aug 16, 2016·0 cites·7 claims
- 0330US2013186337A1Substrate processing device for supplying reaction gas through symmetry-type inlet and outletJE SUNG TAE·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →