P

Inventor

MORI TAKUYA

JP75 patents
⚠️ This page may combine multiple inventors who share the name “MORI TAKUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DENSO CORP

12 patents

TOKYO ELECTRON LTD

12 patents
US11513081B2Nov 29, 2022

Substrate inspection method, substrate treatment system, and computer storage medium

TOKYO ELECTRON LTD0 citations63
US10520450B2Dec 31, 2019

Substrate inspection method, substrate treatment system, and computer storage medium

TOKYO ELECTRON LTD1 citations63
US7524378B2Apr 28, 2009

Maintenance system, substrate processing device, remote operation device, and communication method

TOKYO ELECTRON LTD4 citations63
US12314023B2May 27, 2025

Treatment condition setting method, storage medium, and substrate treatment system

TOKYO ELECTRON LTD0 citations62
US12027393B2Jul 2, 2024

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations62
US11726438B2Aug 15, 2023

Treatment condition setting method, storage medium, and substrate treatment system

TOKYO ELECTRON LTD1 citations62
US11610298B2Mar 21, 2023

Method for determining an abnormality and substrate processing system

TOKYO ELECTRON LTD0 citations62
US11257206B2Feb 22, 2022

Method for correcting processing condition and substrate processing system

TOKYO ELECTRON LTD0 citations62
US7803230B2Sep 28, 2010

Substrate cleaning apparatus, substrate cleaning method, and medium for recording program used for the method

TOKYO ELECTRON LTD5 citations62
US11776105B2Oct 3, 2023

Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatus

TOKYO ELECTRON LTD1 citations56
US11387129B2Jul 12, 2022

Substrate warehouse, substrate processing system, and substrate inspection method

TOKYO ELECTRON LTD0 citations52
US12032294B2Jul 9, 2024

Abnormality detection device of chemical solution, liquid processing device, substrate processing apparatus, abnormality detection method of chemical solution, liquid processing method, and substrate processing method

TOKYO ELECTRON LTD0 citations50

MORI TAKUYA

5 patents

FUJI XEROX CO LTD

4 patents

KAO CORP

3 patents

KUROYANAGI TOMOHIRO

2 patents

OKI ELECTRIC IND CO LTD

1 patent

NEC CORP

1 patent

RALEY ANGELIQUE DENISE

1 patent

MAEMURA KOICHIRO

1 patent

TAKEDA KENTARO

1 patent

NITTO DENKO CORP

1 patent

NISHIMURA TATSUO

1 patent

MOBILE TECHNO CORP

1 patent

BANDO CHEMICAL IND

1 patent

SANDISK TECHNOLOGIES LLC

1 patent

RESONAC CORP

1 patent

SUMITOMO CHEMICAL CO

1 patent

Showing the top 50 of 75 patents by PatentIndex Score.