Inventor
LIM EUI SANG
KR12 patents
Patents
12 patentsUS12222159B2Feb 11, 2025
Apparatus and method for treating substrate
SEMES CO LTD2 citations72
US11942337B2Mar 26, 2024
Apparatus and method for treating substrate
SEMES CO LTD4 citations72
US11020777B2Jun 1, 2021
Substrate treating apparatus
SEMES CO LTD2 citations72
US9978584B2May 22, 2018
Apparatus and method for treating substrate
SEMES CO LTD4 citations71
US11495474B2Nov 8, 2022
Apparatus and method for processing substrate
SEMES CO LTD1 citations62
US11145520B2Oct 12, 2021
Method for treating substrate involving supplying treatment liquid to peripheral area of substrate by second nozzle
SEMES CO LTD1 citations61
US12506018B2Dec 23, 2025
Apparatus and method for treating substrate
SEMES CO LTD0 citations59
US12431347B2Sep 30, 2025
Method for treating substrate
SEMES CO LTD0 citations51
US12293928B2May 6, 2025
Apparatus and method for treating substrate
SEMES CO LTD0 citations51
US12014938B2Jun 18, 2024
Apparatus and method for processing substrate
SEMES CO LTD0 citations51
US9527118B2Dec 27, 2016
System and method for treating a substrate
SEMES CO LTD1 citations51
US12334330B2Jun 17, 2025
Substrate treating apparatus
SEMES CO LTD0 citations50