Inventor
KRONE STEFAN
DE9 patents
⚠️ This page may combine multiple inventors who share the name “KRONE STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS10983443B2Apr 20, 2021
Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device
ZEISS CARL SMT GMBH4 citations63
US9851554B2Dec 26, 2017
Method for displacing at least one optical component
ZEISS CARL SMT GMBH0 citations48
US10018803B2Jul 10, 2018
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
ZEISS CARL SMT GMBH0 citations47
US10444633B2Oct 15, 2019
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
ZEISS CARL SMT GMBH0 citations39
US10437155B2Oct 8, 2019
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
ZEISS CARL SMT GMBH0 citations39
US10866528B2Dec 15, 2020
Component for a projection exposure apparatus
ZEISS CARL SMT GMBH0 citations32