Inventor
GADRE MILIND
US8 patents
Patents
8 patentsUS10410872B2Sep 10, 2019
Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application
APPLIED MATERIALS INC5 citations72
US11011371B2May 18, 2021
SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material
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US10950445B2Mar 16, 2021
Deposition of metal silicide layers on substrates and chamber components
APPLIED MATERIALS INC0 citations60
US11417553B2Aug 16, 2022
Substrate deformation detection and correction
APPLIED MATERIALS INC0 citations58
US10804125B2Oct 13, 2020
Substrate deformation detection and correction
APPLIED MATERIALS INC1 citations58
US10595477B2Mar 24, 2020
Oxide with higher utilization and lower cost
APPLIED MATERIALS INC0 citations51
US10593543B2Mar 17, 2020
Method of depositing doped amorphous silicon films with enhanced defect control, reduced substrate sensitivity to in-film defects and bubble-free film growth
APPLIED MATERIALS INC0 citations50
US10734232B2Aug 4, 2020
Deposition of metal silicide layers on substrates and chamber components
APPLIED MATERIALS INC0 citations49