Inventor
MIN XIAOQUAN
US8 patents
Patents
8 patentsUS11600470B2Mar 7, 2023
Targeted heat control systems
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US10950445B2Mar 16, 2021
Deposition of metal silicide layers on substrates and chamber components
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US11821082B2Nov 21, 2023
Reduced defect deposition processes
APPLIED MATERIALS INC0 citations56
US11322352B2May 3, 2022
Nitrogen-doped carbon hardmask films
APPLIED MATERIALS INC0 citations51
US12191115B2Jan 7, 2025
Dual RF for controllable film deposition
APPLIED MATERIALS INC0 citations50
US10734232B2Aug 4, 2020
Deposition of metal silicide layers on substrates and chamber components
APPLIED MATERIALS INC0 citations49
US12027366B2Jul 2, 2024
Reduced hydrogen deposition processes
APPLIED MATERIALS INC0 citations48
US12062536B2Aug 13, 2024
Amorphous carbon for gap fill
APPLIED MATERIALS INC0 citations39