Inventor
TSUJI AKIHIRO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “TSUJI AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS10109495B2Oct 23, 2018
Plasma etching method for selectively etching silicon oxide with respect to silicon nitride
TOKYO ELECTRON LTD4 citations72
US9330973B2May 3, 2016
Workpiece processing method
TOKYO ELECTRON LTD4 citations72
US11264246B2Mar 1, 2022
Plasma etching method for selectively etching silicon oxide with respect to silicon nitride
TOKYO ELECTRON LTD0 citations62
US11205577B2Dec 21, 2021
Method of selectively etching silicon oxide film on substrate
TOKYO ELECTRON LTD1 citations62
US11462412B2Oct 4, 2022
Etching method
TOKYO ELECTRON LTD0 citations61
US12230505B2Feb 18, 2025
Etching apparatus
TOKYO ELECTRON LTD0 citations51
US10580655B2Mar 3, 2020
Plasma etching method for selectively etching silicon oxide with respect to silicon nitride
TOKYO ELECTRON LTD0 citations51
US9633864B2Apr 25, 2017
Etching method
TOKYO ELECTRON LTD0 citations51
US10553442B2Feb 4, 2020
Etching method
TOKYO ELECTRON LTD0 citations50
US10224211B2Mar 5, 2019
Etching method
TOKYO ELECTRON LTD0 citations41
US9754797B2Sep 5, 2017
Etching method for selectively etching silicon oxide with respect to silicon nitride
TOKYO ELECTRON LTD0 citations41