Inventor
TRAVIS GLENN W
US9 patents
⚠️ This page may combine multiple inventors who share the name “TRAVIS GLENN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS6666756B1Dec 23, 2003
Wafer carrier head assembly
LAM RES CORP34 citations91
US6659116B1Dec 9, 2003
System for wafer carrier in-process clean and rinse
LAM RES CORP20 citations91
US6328637B1Dec 11, 2001
Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization
LAM RES CORP17 citations90
US6086460AJul 11, 2000
Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization
LAM RES CORP41 citations90
US6505636B1Jan 14, 2003
Apparatus for wafer carrier in-process clean and rinse
LAM RES CORP16 citations82
US6486550B1Nov 26, 2002
Locking mechanism for detachably securing a wafer carrier to a conveyor
LAM RES CORP8 citations72
US6409051B1Jun 25, 2002
Method and apparatus for dispensing a fluid media
LAM RES CORP6 citations61