Inventor
CHEN XIAOCHUN LINDA
US6 patents
⚠️ This page may combine multiple inventors who share the name “CHEN XIAOCHUN LINDA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
3 patentsUS7141338B2Nov 28, 2006
Sub-resolution sized assist features
INFINEON TECHNOLOGIES AG15 citations76
US6815367B2Nov 9, 2004
Elimination of resist footing on tera hardmask
INFINEON TECHNOLOGIES AG5 citations60
US6541387B1Apr 1, 2003
Process for implementation of a hardmask
INFINEON TECHNOLOGIES AG1 citations49