Inventor
TEZUKA TARO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TEZUKA TARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
5 patentsUS7724376B2May 25, 2010
Wavefront-aberration measuring method and device, and exposure apparatus including the device
CANON KK3 citations59
US7518735B2Apr 14, 2009
Measurement method and apparatus, exposure apparatus, and device manufacturing method
CANON KK3 citations59
US7463365B2Dec 9, 2008
Measurement method and apparatus, exposure apparatus, and device manufacturing method
CANON KK4 citations59
US7428059B2Sep 23, 2008
Measurement method and apparatus, exposure apparatus, and device manufacturing method
CANON KK4 citations59
US9113507B2Aug 18, 2015
Light source apparatus and method of controlling the same
CANON KK0 citations38