Inventor · disambiguated record
Sven Probst
Also filed as: PROBST SVEN · PROBST SVEN WALTER
4 granted patents·2 citations·filing 2005–2013
57Inventor score
Top patents by PatentIndex Score
4 records- 0144US10542612B2Device and method for providing power to gas discharge lampSAVELIEV ANATOLI·Filed 2009·Granted Jan 21, 2020·0 cites·21 claims
- 0240US8227777B2Method and apparatus for operating an electrical discharge deviceLOEKEN MICHAEL·Filed 2005·Granted Jul 24, 2012·2 cites·25 claims
- 0336US9253865B2Method of calibrating a DPP-generated EUV light sourceUSHIO ELECTRIC INC·Filed 2013·Granted Feb 2, 2016·0 cites·12 claims
- 0434US9455586B2Method for controlling an EUV sourceUSHIO ELECTRIC INC·Filed 2013·Granted Sep 27, 2016·0 cites·17 claims
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