P

Inventor

IMAMURA MASANORI

JP6 patents
⚠️ This page may combine multiple inventors who share the name “IMAMURA MASANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCREEN HOLDINGS CO LTD

4 patents
US10600647B2Mar 24, 2020

Coating apparatus

SCREEN HOLDINGS CO LTD1 citations56
US10144033B2Dec 4, 2018

Substrate processing apparatus and substrate processing method

SCREEN HOLDINGS CO LTD0 citations45
US10698315B2Jun 30, 2020

Substrate treating method

SCREEN HOLDINGS CO LTD0 citations44
US10423070B2Sep 24, 2019

Substrate treating method

SCREEN HOLDINGS CO LTD0 citations36

IMAMURA MASANORI

1 patent
US8580340B2Nov 12, 2013

Substrate processing apparatus and substrate processing method

IMAMURA MASANORI1 citations41

DAINIPPON SCREEN MFG

1 patent
US9436087B2Sep 6, 2016

Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section

DAINIPPON SCREEN MFG0 citations39