Inventor
SCHUSTER INGRID
DE9 patents
⚠️ This page may combine multiple inventors who share the name “SCHUSTER INGRID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS9843153B2Dec 12, 2017
Beam reverser module and optical power amplifier having such a beam reverser module
ZEISS CARL SMT GMBH2 citations70
US10777958B2Sep 15, 2020
Beam reverser module and optical power amplifier having such a beam reverser module
ZEISS CARL SMT GMBH0 citations50
US10503075B2Dec 10, 2019
EUV Collector
ZEISS CARL SMT GMBH0 citations37