Inventor · disambiguated record
Iksu Byun
Also filed as: BYUN IKSU
2 granted patents·4 pending applications·2 citations·filing 2019–2024
35Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
6 records- 0170US10818503B2Method of etching at low temperature and plasma etching apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Oct 27, 2020·2 cites·16 claims
- 0256US2025218843A1Substrate holding unit and substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0351US2025022693A1Electrostatic chucks and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0451US2025233006A1Appartus for detecting position of wafer and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0548US11929239B2Plasma processing apparatus and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 12, 2024·0 cites·18 claims
- 0648US2025218844A1Substrate holding unit and substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →