Inventor

GROEGER PHILIP

DE2 patents

Patents

2 patents

US11092901B2Aug 17, 2021

Wafer exposure method using wafer models and wafer fabrication assembly

QONIAC GMBH2 citations62

US11181830B2Nov 23, 2021

Lithographic apparatus and method of controlling a lithographic apparatus

QONIAC GMBH0 citations45