Inventor
HOL SVEN ANTOIN JOHAN
NL39 patents
⚠️ This page may combine multiple inventors who share the name “HOL SVEN ANTOIN JOHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
32 patentsUS7145269B2Dec 5, 2006
Lithographic apparatus, Lorentz actuator, and device manufacturing method
ASML NETHERLANDS BV30 citations92
US6717296B2Apr 6, 2004
Lithographic apparatus and motor for use in the apparatus
ASML NETHERLANDS BV23 citations92
US6906786B2Jun 14, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations90
US7205741B2Apr 17, 2007
Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV27 citations89
US7468589B2Dec 23, 2008
Lithographic apparatus having a controlled motor, and motor control system and method
ASML NETHERLANDS BV10 citations84
US7245047B2Jul 17, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations84
US6831285B2Dec 14, 2004
Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV15 citations82
US7459808B2Dec 2, 2008
Lithographic apparatus and motor
ASML NETHERLANDS BV13 citations81
US6879377B2Apr 12, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV16 citations79
US7167234B2Jan 23, 2007
Actuator assembly and lithographic apparatus comprising such an actuator assembly
ASML NETHERLANDS BV7 citations74
US7095485B2Aug 22, 2006
Lithographic linear motor, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV10 citations73
US6943464B2Sep 13, 2005
Lithographic apparatus and motor for use in the apparatus
ASML NETHERLANDS BV10 citations73
US9785051B2Oct 10, 2017
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
ASML NETHERLANDS BV5 citations72
US11315752B2Apr 26, 2022
E-beam apparatus
ASML NETHERLANDS BV2 citations70
US10867770B2Dec 15, 2020
E-beam apparatus
ASML NETHERLANDS BV2 citations70
US9535340B2Jan 3, 2017
Support for a movable element and lithography apparatus
ASML NETHERLANDS BV2 citations70
US10372045B2Aug 6, 2019
Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator
ASML NETHERLANDS BV2 citations68
US9927711B2Mar 27, 2018
Actuation mechanism, optical apparatus and lithography apparatus
ASML NETHERLANDS BV3 citations68
US7224429B2May 29, 2007
Lithographic apparatus, device manufacturing method and positioning system
ASML NETHERLANDS BV3 citations62
US7161267B2Jan 9, 2007
Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV6 citations62
US7088428B2Aug 8, 2006
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7079226B2Jul 18, 2006
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7456935B2Nov 25, 2008
Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table
ASML NETHERLANDS BV3 citations61
US7956982B2Jun 7, 2011
Apparatus for cooling
ASML NETHERLANDS BV4 citations60
US11764027B2Sep 19, 2023
Systems and methods of cooling objective lens of a charged-particle beam system
ASML NETHERLANDS BV0 citations57
US7696652B2Apr 13, 2010
Electromagnetic actuator, method of manufacturing a part of an electromagnetic actuator, and lithographic apparatus comprising and electromagnetic actuator
ASML NETHERLANDS BV0 citations52
US9921494B2Mar 20, 2018
Lithographic apparatus comprising an actuator, and method for protecting such actuator
ASML NETHERLANDS BV0 citations50
US9494869B2Nov 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US7072025B2Jul 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US11621142B2Apr 4, 2023
Substrate positioning device and electron beam inspection tool
ASML NETHERLANDS BV0 citations48
US9494878B2Nov 15, 2016
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations40
US9293951B2Mar 22, 2016
Lithographic apparatus and lorentz actuator
ASML NETHERLANDS BV0 citations34
HOL SVEN ANTOIN JOHAN
5 patentsUS8896811B2Nov 25, 2014
Positioning system and a method for positioning a substage with respect to a frame
HOL SVEN ANTOIN JOHAN2 citations56
US9081307B2Jul 14, 2015
Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method
HOL SVEN ANTOIN JOHAN3 citations55
US9172294B2Oct 27, 2015
Planar motor and lithographic apparatus comprising such planar motor
HOL SVEN ANTOIN JOHAN0 citations38
US8687171B2Apr 1, 2014
Electromagnetic actuator, stage apparatus and lithographic apparatus
HOL SVEN ANTOIN JOHAN0 citations36
US8472010B2Jun 25, 2013
Actuator, positioning system and lithographic apparatus
HOL SVEN ANTOIN JOHAN0 citations35