Inventor
YOSHIDA AKIHISA
JP15 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIDA AKIHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
12 patentsUS5814194ASep 29, 1998
Substrate surface treatment method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD134 citations99
US4859908AAug 22, 1989
Plasma processing apparatus for large area ion irradiation
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD230 citations99
US6207282B1Mar 27, 2001
Substrate surface treatment method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD62 citations96
US5141885AAug 25, 1992
Method of fabrication of thin film transistors
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD56 citations96
US6518494B1Feb 11, 2003
Silicon structure, method for producing the same, and solar battery using the silicon structure
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD64 citations94
US6577386B2Jun 10, 2003
Method and apparatus for activating semiconductor impurities
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD16 citations92
US6255201B1Jul 3, 2001
Method and device for activating semiconductor impurities
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD23 citations92
US5766342AJun 16, 1998
Method for forming silicon film and silicon film forming apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD19 citations92
US6127211AOct 3, 2000
Method of manufacturing transistor
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations72
US5976919ANov 2, 1999
Apparatus and method of manufacturing semiconductor element
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations63
US6123774ASep 26, 2000
Apparatus and method of manufacturing semiconductor element
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations52
US6984540B2Jan 10, 2006
Surface acoustic wave device and method for producing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations47