Inventor
BASSO MARIE-THERESE
FR2 patents
Patents
2 patentsUS6281556B1Aug 28, 2001
Process for forming a low resistivity titanium silicide layer on a silicon semiconductor substrate and the resulting device
ST MICROELECTRONICS SA20 citations86
US6812121B2Nov 2, 2004
Process for forming a low resistivity titanium silicide layer on a silicon semiconductor substrate
ST MICROELECTRONICS SA0 citations45