Inventor
YAMAGUCHI YUKO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI YUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CLARIANT FINANCE BVI LTD
4 patentsUS6479210B2Nov 12, 2002
Chemically amplified resist composition
CLARIANT FINANCE BVI LTD77 citations95
US6284427B1Sep 4, 2001
Process for preparing resists
CLARIANT FINANCE BVI LTD18 citations92
US6686121B2Feb 3, 2004
Process for preparing resists
CLARIANT FINANCE BVI LTD6 citations73
US6527966B1Mar 4, 2003
Pattern forming method
CLARIANT FINANCE BVI LTD11 citations73