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Inventor

LIDDLE JAMES A

US9 patents
⚠️ This page may combine multiple inventors who share the name “LIDDLE JAMES A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AT & T BELL LAB

3 patents
US5260151ANov 9, 1993

Device manufacture involving step-and-scan delineation

AT & T BELL LAB100 citations92
US5316879AMay 31, 1994

Sub-micron device fabrication using multiple aperture filter

AT & T BELL LAB20 citations91
US5279925AJan 18, 1994

Projection electron lithographic procedure

AT & T BELL LAB28 citations91

LUCENT TECHNOLOGIES INC

2 patents
US6528799B1Mar 4, 2003

Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems

LUCENT TECHNOLOGIES INC18 citations82
US5561008AOct 1, 1996

Process for device fabrication using projection lithography and an apparatus therefor

LUCENT TECHNOLOGIES INC13 citations71

AGERE SYSTEMS INC

2 patents
US6700708B2Mar 2, 2004

Micro-lens array and method of making micro-lens array

AGERE SYSTEMS INC8 citations71
US6906846B2Jun 14, 2005

Micro-electro-mechanical system device and method of making same

AGERE SYSTEMS INC5 citations59

TRIQUINT TECHNOLOGY HOLDING CO

1 patent
US7042645B2May 9, 2006

Micro-lens array and method of making micro-lens array

TRIQUINT TECHNOLOGY HOLDING CO21 citations90

AT & T CORP

1 patent
US5500312AMar 19, 1996

Masks with low stress multilayer films and a process for controlling the stress of multilayer films

AT & T CORP36 citations90