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Inventor
JEKAUC IGOR
US
2 patents
Patents
2 patents
US7381576B2
Jun 3, 2008
Method and apparatus for monitoring precision of water placement alignment
INFINEON TECHNOLOGIES RICHMOND
4 citations
50
US6881592B2
Apr 19, 2005
Method and device for minimizing multi-layer microscopic and macroscopic alignment errors
INFINEON TECHNOLOGIES RICHMOND
0 citations
38