Inventor
TORIKOSHI TSUNEO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “TORIKOSHI TSUNEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
12 patentsUS9610673B2Apr 4, 2017
Polishing method and apparatus
EBARA CORP7 citations82
US7989348B2Aug 2, 2011
Polishing method and polishing apparatus
EBARA CORP6 citations73
USD864978SOct 29, 2019
Display screen with animated graphic user interface
EBARA CORP2 citations72
USD854564SJul 23, 2019
Display screen with graphical user interface
EBARA CORP2 citations72
USD852206SJun 25, 2019
Display screen with animated graphical user interface
EBARA CORP2 citations72
US10478938B2Nov 19, 2019
Polishing method and apparatus
EBARA CORP5 citations71
US12036634B2Jul 16, 2024
Substrate processing control system, substrate processing control method, and program
EBARA CORP1 citations62
US7720562B2May 18, 2010
Polishing method and polishing apparatus
EBARA CORP2 citations61
US11897078B2Feb 13, 2024
Polishing apparatus, information processing system, polishing method, and computer-readable storage medium
EBARA CORP0 citations47
US9847263B2Dec 19, 2017
Substrate processing method including reprocessing rejected wafers
EBARA CORP1 citations43
US9524913B2Dec 20, 2016
Polishing method and polishing apparatus
EBARA CORP0 citations43
US10559277B2Feb 11, 2020
Non-transitory computer-readable storage medium storing a program of screen control and semiconductor manufacturing apparatus
EBARA CORP0 citations40