Inventor
TSENG MING-KUEI
US16 patents
⚠️ This page may combine multiple inventors who share the name “TSENG MING-KUEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS6890249B1May 10, 2005
Carrier head with edge load retaining ring
APPLIED MATERIALS INC69 citations98
US6722965B2Apr 20, 2004
Carrier head with flexible membranes to provide controllable pressure and loading area
APPLIED MATERIALS INC66 citations96
US6663466B2Dec 16, 2003
Carrier head with a substrate detector
APPLIED MATERIALS INC59 citations96
US7101273B2Sep 5, 2006
Carrier head with gimbal mechanism
APPLIED MATERIALS INC37 citations92
US7094139B2Aug 22, 2006
Retaining ring with flange for chemical mechanical polishing
APPLIED MATERIALS INC32 citations92
US6857931B2Feb 22, 2005
Method of detecting a substrate in a carrier head
APPLIED MATERIALS INC25 citations92
US6835125B1Dec 28, 2004
Retainer with a wear surface for chemical mechanical polishing
APPLIED MATERIALS INC35 citations92
US6398621B1Jun 4, 2002
Carrier head with a substrate sensor
APPLIED MATERIALS INC14 citations92
US7677958B2Mar 16, 2010
Retaining ring with flange for chemical mechanical polishing
APPLIED MATERIALS INC11 citations84
US7134948B2Nov 14, 2006
Magnetically secured retaining ring
APPLIED MATERIALS INC15 citations83
US6547641B2Apr 15, 2003
Carrier head with a substrate sensor
APPLIED MATERIALS INC4 citations63
US7934979B2May 3, 2011
Retaining ring with tapered inner surface
APPLIED MATERIALS INC3 citations62
US7678245B2Mar 16, 2010
Method and apparatus for electrochemical mechanical processing
APPLIED MATERIALS INC0 citations52
LAM RES CORP
3 patentsUS11031215B2Jun 8, 2021
Vacuum pump protection against deposition byproduct buildup
LAM RES CORP3 citations69
US11710623B2Jul 25, 2023
Vacuum pump protection against deposition byproduct buildup
LAM RES CORP1 citations68
US12087561B2Sep 10, 2024
Vacuum pump protection against deposition byproduct buildup
LAM RES CORP0 citations59